![Cleanroom Researchers 2](https://divisions-prod.s3.amazonaws.com/mems/images/DSCN0039.dd29f515.fill-1600x500-c100.jpg)
Facilities
The Caltech Micromachining Laboratory was formally established after Dr. Yu-Chong Tai joined the EE faculty in 1989. Currently, the lab is located in the Moore Lab buidling. The MEMS Lab occupies over 6,200 sq. ft. including a Clean-Room Fabrication lab, a computer lab, MEMS measurement labs, and offices. Overall, the Caltech Micromachining Lab facilitates has a full line of silicon-micromachining capabilities and supports 2-4″ silicon wafers.
The 2,500 sq. ft. Clean-Room Fabrication lab is maintained under class-100 clean room conditions for lithography, metalization, oxidation and so on. Another 1,000 sq. ft. is class-1000 Clean Room for chemical and coating processing. In addition to the 3,500 square feet of clean-room processing area, 500 square feet of lab is for computer-aided design (CAD) and 2,000 square foot of space for electrical, mechanical and fluidic testing and office space.
![Cleanroom DRIE](https://divisions-prod.s3.amazonaws.com/mems/images/Cleanroom_DRIE.2e16d0ba.fill-439x350-c100.jpg)
![Cleanroom - paper wafer](https://divisions-prod.s3.amazonaws.com/mems/images/Cleanroom_paper_wafer_2.2e16d0ba.fill-439x350-c100.jpg)
![Skull (5).jpg](https://divisions-prod.s3.amazonaws.com/mems/images/Skull_5.2e16d0ba.fill-439x350-c100.jpg)