2004 Highlights Back to the top

2003 Highlights Back to the top

• Yield Strength of Thin-Film Parylene-C
• IC-Integrated Flexible Shear-Stress Sensor Skin
• Selective Deposition of Parylene-C for Underwater Shear-Stress Sensors
• Electrolysis-Based On-Chip Dispensing System for ESI-MS
• Polymer MEMS for Micro Fluid Delivery Systems
• Integrated Surface-Micromachined Mass Flow Controller
• Robust Parylene-to-Silicon Mechanical Anchoring
• Micromachined High-Aspect-Ratio Parylene Beam and Its Application Low-Frequency Seismometer
• Surface Micromachined and Integrated Capacitive Sensors for Microfluidic Applications
• A Parylene MEMS Flow Sensing Array
• Nanometer Gaps by Feedback-Controlled Electromigration
• Parylene Neuro-Cages for Live Neural Networks Study
• Developement of Surface Micromachinable Capacitive Accelerometer using Fringe Electrical Field

2002 Highlights Back to the top

• A Thermopneumatic Microfluidic System
• Photo-patternable Gelatin as Protection Layers in Surface Micromachines
• Marching Velocity of Capillary Meniscuses in Microchannels
• Dielectric Charging Effects on Parylene Electrostatic Actuators
• Residual Stress in Thin-Film Parylene-C
• Underwater Shear-Stress Sensor
• Flexible Shear-Stress Sensor Skin and its Application to Unmanned Aerial Vehicles
• Integrated Electrospray Chip for Mass Spectrometry
• Micropower Generator

2001 Highlights Back to the top

• Flexible Parylene Actuator for Micro Adaptive Flow Control
• A MEMS Body Fluid Flow Sensor
• Titanium-alloy MEMS Wing Technology for a Micro Aerial Vehicle Application
• Microbat: A Palm Sized Electronically Powered Ornithopter

Research Sponsors

DARPA, AFOSR, ARO, ONR, NASA, JPL, NSF (PYI Award), NIH, Packard and Lucile Foundation (Packard Fellowship), HP, GM, Seagate, Rockwell International, Medtronics, Topomatrix, Xerox, BEI, and NSIC/DARPA.