Pressure Sensors

J. Liu and Y. C. Tai, "MEMS for Pressure Distribution Studies of Gaseous Flows in Microchannels," Proceedings, 1995 IEEE Micro Electro Mechanical Systems Workshop (MEMS '95), Amsterdam, The Netherlands, pp. 209-215, Jan. 29-Feb. 2 (1995).

K. C. Pong, C. M. Ho, J. Q. Liu, and Y. C. Tai, "Non-Linear Pressure Distribution in Uniform Microchannels," Application of Microfabrication to Fluid Mechanics 1994 presented at 1994 ASME International Mechanical Engineering Congress and Exposition, Chicago, IL, pp. 51-56, Nov. 6-11 (1994).

J. Q. Liu and Y. C. Tai, "Micromachined Channel/Pressure Sensor Systems for Micro Flow Studies," Technical Digest, The 7th International Conference on Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, pp. 995-997, Jun. 7-10 (1993).