F. Jiang, Y. C. Tai, Ken Walsh, T. Tsao, G. B. Lee, and C. M. Ho, "A Flexible MEMS Technology and Its First Application to Shear Stress Sensor Skin," Proceedings, 1997 IEEE Micro Electro Mechanical Systems Workshop (MEMS '97), Nagoya, Japan, pp. 465-470, Jan. 26-30 (1997).