Caltech Micromachining Laboratory Surface Micromachined and Integrated Capacitive Sensors for Microfluidic Applications

Project Abstract

We have demonstrated an entire series of capacitive sensors using a multi-layer parylene/photoresist surface micromachining technology. The developed sensors are designed for total integration into parylene-based microfluidic systems for real-time system monitoring. Sensors have been demonstrated for the following applications: 1) in-line pressure sensing (range: 0 - 35 kPa, resolution: 0.03 kPa); 2) liquid front position and/or volumetric measurements (range: 0 - >50 pL, resolution: < 5 pL); and 3) dielectric measurements, which can be used to deduce fluid properties such as liquid composition. The reported sensor technology demonstrates versatility, high sensitivity, small footprints, and easy integration.

References

J. Shih, J. Xie and Y.C. Tai,"Surface Micromachined and Integrated Capacitive Sensors for Microfluidic Applications," Technical Digest, The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), Boston, USA, pp. 388-391 (2003).

Involved Personnel

Jason Shih, Jun Xie, Yu-Chong Tai

Related Publications

  • J. Xie, X. Yang, X.Q. Wang, Y.C. Tai, "Surface Micromachined Leakage Proof Parylene Check Valve." 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01). 2001. pg. 539-542.

  • J. Xie, J. Shih, Y.C. Tai. "Integrated Surface-Micromachined Mass Flow Controller." 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '03). 2003. pg. 20-23.

  • J. Xie, Q. He, Y.C. Tai, J. Liu, T. Lee. "Electrolysis-Based On-Chip Dispensing System for ESI-MS." 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '03). 2003. pg. 443-446.

  • T.J. Yao, X. Yang, Y.C. Tai. "BrF3 Dry Release Technologies for Large Freestanding Parylene MEMS." International Conference on Solid-State Sensors and Actuators (Transducers '01). 2001. pg. 652-655.

  • S. Wu, J. Mai, Y. Zohar, Y.C. Tai, C.M. Ho. "A Suspended microchannel with Integrated Temperature Sensors for High-Pressure Flow Studies." 11th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '98). 1998. pg. 87-92.