Caltech Micromachining Laboratory
Polymer MEMS for Micro Fluid Delivery Systems
Project Abstract
Polymer materials have distinct advantages over traditional engineering
materials used in microelectromechanical systems (MEMS). Incentives
for using polymers include increased fracture strength; low Young’s
Modulus and durometer; high elongation; and reduced material costs.
Furthermore, polymers can be inert and biocompatible making them extremely
attractive for use in biological and chemical applications. A miniature
prototype fluid delivery system incorporating parylene, silicone, PEEK, and
polyolefin is presented here using a micropump as the fluid actuator, a
thermal flow sensor as a fluidic control device, and micromachined couplers
as fluidic interconnects. This type of system is important in the development
of microdispensers for lab-on-a-chip and offers excellent performance including
flow sensing down to 0.5 mL/min.
Involved Personnel
Ellis Meng and Yu-Chong Tai
Related Publications
Wang, X.-Q., Q. Lin, and Y.-C. Tai, A Parylene Micro Check Valve, in MEMS '99. 1999: Orlando, FL. p. 177.
Meng, E., X.-Q. Wang, H. Mak, and Y.-C. Tai, A Check-Valved Silicone Diaphragm Pump, in MEMS 2000. 2000: Miyazaki, Japan.
Meng, E. and Y.-C. Tai, A Parylene MEMS Flow Sensing Array, in Transducers 2003. 2003: Boston, MA.
Meng, E., S. Wu, and Y.-C. Tai Fresenius Journal of Analytical Chemistry 2001, 371(2), 270.
Xie, J., J. Shih, and Y.-C. Tai, Integrated Surface-Micromachined Mass Flow Controller, in MEMS '03. 2003: Kyoto, Japan
