Micro Power Generation
Project Goal
The objective of this project is to develop a micromachined power generator
Project Abstract
We present the first micromachined rotational electret power generator,
linearized theoretical model of electret power generation, and novel
method to produce uniformly charged electret. We also improved our previously
developed [1, 2] thin film Teflon AF 1601-S electret technology with respect
to dielectric thickness, charge uniformity, and processability. In
demonstration, our prototype power generator successfully generated > 25μW
with electret thickness of 9μm, effective charge density of -2.8x10-4C/m2,
and rotational speed of 4170RPM.
Research Sponsor
NSF ERC Center for Neuromorphic Systems
Involved Personnel
Justin Boland
Related publications
T.Y. Hsu, W.H. Hsieh, K.Furutani and Y.C. Tai, Hilton Head 1996, pp. 235-238
W.H. Hsieh, T.J. Yao and Y.C. Tai, MEMS 1999, pp. 1064-1067
Patent Pending