Caltech Micromachining Laboratory

A Thermopneumatic Microfluidic System Caltech Micromachining Laboratory

Project Abstract

A self-contained planar microfluidic system using thermopneumatic actuation has been demonstrated. Using a novel suspended silicon island heater fabricated by deep reactive ion etching (DRIE), and a precision machined acrylic fluidic substrate with a matching silicone rubber membrane, a self-contained system of channels, valves, and a pump has been demonstrated using air as a working fluid.

Involved Personnel

Charles Grosjean, Xing Yang, and Yu-Chong Tai

Related Publications

C. Grosjean and Y. C. Tai, “A Thermopneumatic Peristaltic Micropump,” 1999 International Conference on Solid-State Sensors and Actuators (Transducers’99), Sendai, Japan, June 1999.

C. Grosjean, X. Yang, and Y.C. Tai, “A Practical Thermopneumatic Valve,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘99), Florida, USA, pp. 147-152, Jan. 17-21, 1999.