Integrated Electrospray Chip for Mass Spectrometry
Caltech Micromachining Laboratory
Project Abstract
We report here a novel micromachined fluid dispensing system for ESI-MS (Electrospray
Ionization - Mass Spectrometry) that has integrated electrolysis-based micro pump, micro
mixer and ESI nozzle on a single chip. The whole structure is built by multi-layer
Parylene surface micromachining technology. Using this system, precise and multi-sample
dispensing for ESI-MS can be achieved on a single chip.
Personnel Involved
Jun Xie, Qing He, Yu-Chong Tai, Jun Liu and Terry Lee
Related Publications