Flexible Shear-Stress Sensor Skin and its Application to Unmanned Aerial Vehicles
Caltech Micromachining Laboratory
Project Abstract
Shear stress information is of great interest for many fluidic dynamic monitoring/diagnostics
application. To obtain such information on nonplanar surfaces has long been a big challenge.
This paper describes the development of flexible shear-stress sensor skin and its application on
the detection of flow separation for Unmanned Aerial Vehicles (UAVs). The sensor skin contains
a 1-D array of 36 shear-stress sensors, which can cover the 180° surface of the half-inch diameter
semicylindrical UAV leading edge with 5° resolution. The implementation process of the sensor skin
is significantly simplified by a packaging scheme based on solder-bonding and flexible printed
circuit board (PCB). The flow separation along the leading edge was successfully detected by the
flexible shear-stress sensor skin in both wind tunnel and real flight tests. The complete flight control
system for the UAV, which is a M3 system (microsensors, microelectronics, and microactuators), was also
demonstrated in the wind tunnel.
Involved Personnel
Yong Xu, Fukang Jiang, Yu-Chong Tai, Adam Huang, Chih-Ming Ho and Scott Newbern
Related Publications
C. M. Ho and Y. C. Tai, Review: MEMS and its applications for flow control, J. Fluids Eng.-Trans. ASME, 118, (1996) 437-447
F. Jiang, Y. C. Tai, B. Gupta, R. Goodman, S. Tung, J. B. Huang and C. M. Ho, A Surface-Micromachined Shear Stress Imager, IEEE International
Conference on Micro Electro Mechanical Systems (MEMS), San Diego, CA, Feb. 11-15,1996, p.110-115
F. Jiang, Y.-C. Tai, K. Walsh, T. Tsao, G.-B. Lee and C.-M. Ho, Flexible MEMS technology and its first application to shear stress sensor skin, IEEE
International Conference on Micro Electro Mechanical Systems (MEMS), Nagoya, Japan, Jan 26-30,1997, p.465-470
C. Grosjean, G. Lee, W. Hong, Y. C. Tai and C. M. Ho, Micro Balloon Actuators for Aerodynamic Control, IEEE International Conference
on Micro Electro Mechanical Systems (MEMS), Heidelberg, Germany, Jan. 25-29,1998, p.137-142
C. Liu, Y. C. Tai, J. B. Huang and C. M. Ho, Surface Micromachined Thermal Shear Stress Sensor, ASME International Mechanical
Engineering Congress and Exposition, Chicago, IL, Nov. 6-11,1994, p.9-15
C. Liu and Y.-C. Tai, Sealing of micromachined cavities using chemical vapor deposition methods: characterization and
optimization, J. Microelectromech. Syst., 8, (1999) 135-45