A MEMS Body Fluid Flow Sensor
Project Abstract
To achieve in vitro flow rate measurements of biological fluids in such tasks as hematological
studies and urinalysis, a MEMS flow sensor has been developed. Flow sensing is achieved by measuring
the forced convective heat transfer from a thermal sensing element to the fluid. Currently, fluid
flow down to 10 ml/min can be detected.
Personnel Involved
Ellis Meng, Sascha Gassmann, and Yu-Chong Tai
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