Tze-Jung Yao, Ph.D.
 

Yao's Photo

email: yao@touch.caltech.edu
 

Research

  • Micromachined Rubber O-ring Micro-Fluidic Couplers
  • Surface Micromachined Parylene Electrostatic Actuators
  • Micromachined Thermopneumatic Valve

    • Education

    Ph.D Electrical Engineering with Biology Minor, Caltech, Dec, 2001 (Expected)
    M.S.     Electrical Engineering, Caltech, June, 1998
    B.S.     Electrical Engineering, National Taiwan University, June, 1995

    Honors and Awards

    Charles Lee Powell Foundation Graduate Fellowship (summer 1998)

    Recent Publications

    L.J. Yang, T.J. Yao and Y.C. Tai, and C.M. Ho,"Photo-Patternable Gelatin as Protection Layers in Surface-Micromachinings," Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, USA, Jan. 20-24 (2002).

    L.J. Yang, T.J. Yao, Y.L. Huang, Y. Xu and Y.C. Tai, "Marching Velocity of Capillary Meniscuses in Microchannels,” Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, USA, Jan. 20-24 (2002).

    T. Harder, T.J. Yao, Q. He, C.Y. Shih and Y.C. Tai,"Residual
    Stress in thin-film Parylene-C    ,” Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, USA, Jan. 20-24 (2002).

    T.J. Yao, K. Walsh and Y.C. Tai," Dielectrics Charging Effects on Parylene Electrostatic Actuators,” Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, USA, Jan. 20-24 (2002).

    T.J. Yao, X. Yang, and Y.C. Tai," BrF3 Dry Release Technologies for Large Freestanding Parylene MEMS," 2001 International Conference on Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, Jun. 10-14(2001).

    T.J. Yao, X. Yang, and Y.C. Tai," BrF3 Dry Release Technologies for Large Freestanding Parylene MEMS and Electrostatic Actuators," will be published at Sensor and Actuators A.

    T.J. Yao, S.W. Lee, W. Fang, and Y.C. Tai,"A Micromachined Rubber O-ring Microfluidic Coupler," Thirteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), Miyazaki, Japan, Jan. 23-27 (2000).

    W.H. Hsieh, T.J. Yao, and Y.C. Tai," A High Performance MEMS Thin-film Teflon Electret Microphone," 1999 International Conference on Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, Jun.(1999).