Xuan-Qi Wang, Ph.D.
 

xq's photo

email: wang@touch.caltech.edu
 
Research
  • MEMS chip for Electrospray Mass Spectrometry

  • Microfluidic Devices

  • Integration of IC and MEMS devices

  • Parylene as a MEMS Material

  • BrF3 Gas Phase Silicon Etching

    Education

    B.S. 1989, Tsinghua University
    M.S. 1996, Caltech

    Recent Publications

    X.Q. Wang, X. Yang, K. Walsh, and Y.C Tai. "Gas Phase Silicon Etching with Bromine Trifluoride". Transducer, 97.

    X.Q. Wang, Q. Lin and     Y.C Tai. "A Parylene Micro Check Valve". MEMS 99.

    X.Q. Wang, A. Desai,     Y.C Tai, L. Licklider, and T.D. Lee. "Polymer-Based Electrospray Chips for Mass Spectroscopy". MEMS 99.

    X.Q. Wang, Z. Han, F. Jiang, T. Tsao, Q. Lin,     Y.C Tai, and C.M. Ho. "A Fully Integrated Shear Stress Sensor". Transducer, 99.