Caltech Micromachining Laboratory

Publications

Matthieu Liger, Satoshi Konishi and Yu-Chong Tai, "Uncooled All-Parylene Bolometer", The 17th IEEE International MEMS Conference (MEMS'04), Maastricht, Netherlands Jan 15-29 2004, p593.

Yoshihiro Mizuno, Matthieu Liger,and Yu-Chong Tai, "Nanofluidic Flowmeter Using Carbon Sensing Element", The 17th IEEE International MEMS Conference (MEMS'04), Maastricht, Netherlands Jan 15-29 2004, p322.

Satoshi Konishi, Matthieu Liger, Theodore Harder, and Yu-Chong Tai, "Parylene-Pyrolyzed Carbon for MEMS Applications", The 17th IEEE International MEMS Conference (MEMS'04), Maastricht, Netherlands Jan 15-29 2004, p161.

Hung-Te Hsieh, George Panotopoulos, Matthieu Liger, Yu-Chong Tai, and Demetri Psaltis, "Athermal Holographic Filters" IEEE Photonics Technology Letters, Vol. 16-1, p177-179, January 2004

Matthieu Liger, Damien C. Rodger and Yu-Chong Tai, "Robust Parylene-to-Silicon Mechanical Anchoring", The 16th IEEE International MEMS Conference (MEMS'03), Kyoto, Japan Jan 19-23 2003, p602.

Matthieu Liger, Nick Pornsin-Sirirak , Yu-Chong Tai, Steve Ho and Chih-Ming Ho, "Large-Area Electrostatic-valved skins for Adaptive Flow Control on Ornithopter Wings ", Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island, South Carolina USA, June 2-6 2002, p247.

Matthieu Liger, " Le Parylene: un polymère au service des microsystèmes ", Etats-Unis Microélectronique Nº27 p15-16, 26 Avril 2002 .

Nick Pornsin-Sirirak, Matthieu Liger, Yu-Chong Tai, Steve Ho and Chih-Ming Ho, " Flexible Parylene-Valved Skin for Adaptive Flow Control ", The 15th IEEE International MEMS Conference (MEMS '02), Las Vegas, U.S.A., Jan 20-24, 2002, p101.

N. Herbots, J.M. Shaw, M. Liger, M.P. Grams, D.J. Smith, " Low Temperature Heteroepitaxial Titanium Silicide Phases in 3 nm Islands Seeded on (7x7)Si(111) Templates at T<500ºC " Material Research Society Symposium on Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures Proceeding, April 20th 2001.

Research Topic

Education

Honors and Awards

Publications

	Matthieu Liger, Ph.D.

		e-mail: matt@mems.caltech.edu
	Research Topic Parylene-Based Uncooled Infrared Sensors and Focal-Plane Arrays Education Ph.D. Electrical Engineering, California Institute of Technology, 2005 M.S.: Electrical Engineering, California Institute of Technology, 2001. B.S/M.S.: Electrical Engineering, ESIEE-Paris (Ecole Supérieure D'Ingénieurs en Electronique et Electrotechnique ), 2001. Honors and Awards Motorola-ESIEE Award (2001). Albert and Marguerite Ramond Foundation Fellowship (2000-2001). Publications Matthieu Liger, Satoshi Konishi and Yu-Chong Tai, "Uncooled All-Parylene Bolometer", The 17th IEEE International MEMS Conference (MEMS'04), Maastricht, Netherlands Jan 15-29 2004, p593. Yoshihiro Mizuno, Matthieu Liger,and Yu-Chong Tai, "Nanofluidic Flowmeter Using Carbon Sensing Element", The 17th IEEE International MEMS Conference (MEMS'04), Maastricht, Netherlands Jan 15-29 2004, p322. Satoshi Konishi, Matthieu Liger, Theodore Harder, and Yu-Chong Tai, "Parylene-Pyrolyzed Carbon for MEMS Applications", The 17th IEEE International MEMS Conference (MEMS'04), Maastricht, Netherlands Jan 15-29 2004, p161. Hung-Te Hsieh, George Panotopoulos, Matthieu Liger, Yu-Chong Tai, and Demetri Psaltis, "Athermal Holographic Filters" IEEE Photonics Technology Letters, Vol. 16-1, p177-179, January 2004 Matthieu Liger, Damien C. Rodger and Yu-Chong Tai, "Robust Parylene-to-Silicon Mechanical Anchoring", The 16th IEEE International MEMS Conference (MEMS'03), Kyoto, Japan Jan 19-23 2003, p602. Matthieu Liger, Nick Pornsin-Sirirak , Yu-Chong Tai, Steve Ho and Chih-Ming Ho, "Large-Area Electrostatic-valved skins for Adaptive Flow Control on Ornithopter Wings ", Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island, South Carolina USA, June 2-6 2002, p247. Matthieu Liger, " Le Parylene: un polymère au service des microsystèmes ", Etats-Unis Microélectronique Nº27 p15-16, 26 Avril 2002 . Nick Pornsin-Sirirak, Matthieu Liger, Yu-Chong Tai, Steve Ho and Chih-Ming Ho, " Flexible Parylene-Valved Skin for Adaptive Flow Control ", The 15th IEEE International MEMS Conference (MEMS '02), Las Vegas, U.S.A., Jan 20-24, 2002, p101. N. Herbots, J.M. Shaw, M. Liger, M.P. Grams, D.J. Smith, " Low Temperature Heteroepitaxial Titanium Silicide Phases in 3 nm Islands Seeded on (7x7)Si(111) Templates at T<500ºC " Material Research Society Symposium on Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures Proceeding, April 20th 2001.