Wendian (Leo) Shi
	136-93 Caltech Moore Laboratory Pasadena, CA 91125 U.S.A. E-mail: wendian at mems dot Caltech dot edu phone: (626) 395-2227 Cell: (626) 616-6763 Fax: (626) 584-9104 Office: Moore 47
Education B.S. Microelectronics, Peking University , 2000 - 2004 M.S. Microelectronics & Solid State Electronics, 2004 - 2007 M.S. Electrical Engineering, California Institute of Technology, 2007 Research Experiences MEMS Research Center, EECS School, Peking University, 2004 – 2007 Research on electro-thermo actuated RF micro switch, directed by Prof. Zhihong Li. Research on modifying residual stress in Si3N4 film, directed by Prof. Haixia Zhang & Prof. Zhihong Li. Publication [1] W. Shi, H. Zhang, S. Wang, G. Zhang and Z. Li, “Modifying residual stress and stress gradient in LPCVD Si3N4 film with ion implantation,” in Proc. 13th IEEE Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers’05), Jun. 2005, vol. 1, pp. 824-827. [2] W. Shi, H. Zhang, G. Zhang, and Z. Li, “Modifying residual stress and stress gradient in LPCVD Si3N4 film with ion implantation,” Sensors & Actuators A: Physical, vol. 130-131, pp. 352-357, 2006 [3] W. Shi, Norman C. Tien, and Z. Li, “A highly reliable lateral MEMS switch utilizing undoped polysilicon as isolation material,” accepted to be published in Journal of Microelectromechanical Systems, May 2007. Other Stuff about me My photo album: http://www.flickr.com/photos/sllswd/ My homepage: http://ime.pku.edu.cn/~swd/