The Caltech Micromachining Laboratory was formally established right after Dr.
Yu-Chong Tai joined the EE faculty in 1989. Currently, the lab occupies a total
area of 7,500 sq. ft. including a clean-room fab, a computer lab, MEMS measurement
labs, and offices. Physically, the lab stays in two buildings -- Steele and
Moore Labs on the Caltech main campus. The Steele facility (1,500 sq. ft.)
was established in 1991 and the
sq. ft.) was added on in 1996. Overall, the Caltech Micromachining Lab facilitates
a full line of silicon-micromachining capabilities and supports 2-4" silicon
For Directions to come to Campus, click here.
The following are our sponsors who made this lab possible:
Equipment List and Laboratory Rules are Under Construction