CALIFORNIA INSTITUTE OF TECHNOLOGY
MICROMACHINING LABORATORY
  Courses
   
 

Undergraduate Courses

EE40 - Introduction to Sensors and Actuators.

9 units (3-0-6); third term. Prerequisites: Ph 1 abc and EE 20 ab. This course provides an introduction to various sensors and actuators. The fundamental principles of the devices will be emphasized, together with their electrical implementation, such as biasing and signal processing circuits. A collection of devices that will be discussed include optical sensors, solar cells, CCD, CMOS imager, temperature sensors, magnetic sensors, mechanical sensors, acoustic sensors (microphones), speakers, electrical generators, motors, etc.

Graduate Courses

EE185 - MEMS Technology and Devices

9 units (3-0-6); first term. Prerequisites: APh/EE 9 ab, EE 187, or instructor's permission. Micro-electro-mechanical systems (MEMS) have been broadly used for biochemical, medical, RF, and lab-on-a-chip applications. This course will cover both MEMS technologies (e.g., micro- and nanofabrication) and devices. For example, MEMS technologies include anisotropic wet etching, RIE, deep RIE, micro/nano molding and advanced packaging. This course will also cover various MEMS devices used in microsensors and actuators. Examples will include pressure sensors, accelerometers, gyros, FR filters, digital mirrors, microfluidics, micro total-analysis system, biomedical implants, etc.

EE187 - VLSI and ULSI Technology

9 units (3-0-6); first term. Prerequisites: APh/EE 9 ab, EE/APh 180 or instructor's permission. This course is designed to cover the state-of-the-art micro/nanotechnologies for the fabrication of ULSI including BJT, CMOS, and BiCMOS. Technologies include lithography, diffusion, ion implantation, oxidation, plasma deposition and etching, etc. Topics also include the use of chemistry, thermal dynamics, mechanics, and physics.


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