Professor: Dr. Yu-Chong Tai

TAs:  Po-Jui (PJ) Chen and Angela Tooker

         Location: Moore 68 (on the basement)

         Office hours are subject to change rearding homework due date.
         Questions can be also asked via email.

Course Materials: Class Notes and recent publications.

Reference Books:

1. S. Wolf and R.N. Tauber, "Silicon Processing" Vol. 1, 2 and 3, Lattice Press
2. M. Madou, "Fundamentals of Microfabrication"
3. S. M. Sze, "Semiconductor Sensors"
4. Kovacs, "Micromachined Transducer Sourcebook"

Description:

9 units (3-0-6); first term. This is a senior/1st-year graduate course on fundamental MEMS technology and devices (including silicon techniques). Topics will first emphasize the fundamental technologies such as “bulk” micromachining, “surface” micromachining, LIGA, bonding/sealing, packaging and even nanotechnology. Various MEMS and NEMS devices (such as Optical MEMS, RF MEMS, Bio MEMS, and lab-on-a-chip) and some fundamental MEMS theories will also be covered.

Syllabus

Lecture Notes

Will be handed out to students by email

Homework:  (NO COLLABORATION)