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EE40 - Semiconductor Sensors and Actuators

9 units (3-0-6); third term. Prerequisites: APh/EE 9 ab, Ma 2, Ph 2. This course provides an introduction to semiconductors and semiconductor sensors. The fundamental physics of semiconductor electronics and devices will be emphasized, together with their applications. Devices that will be discussed include photoconductors, diodes, transistors, CCDs, MOS/MOSFET/MOS imagers, temperature sensors, magnetic sensors, thermoelectricity, piezoresistivity, piezoelectrics, etc.







EE/MedE/BE 185 - MEMS Technology and Device

9 units (3-0-6); third term. Prerequisite: APh/EE 9 ab, or instructor’s permission. Micro-electro-mechanical systems (MEMS) have been broadly used for biochemical, medical, RF, and lab-on-a-chip applications. This course will cover both MEMS technologies (e.g., micro- and nanofabrication) and devices. For example, MEMS technologies include anisotropic wet etching, RIE, deep RIE, micro/nano molding and advanced packaging. This course will also cover various MEMS devices used in microsensors and actuators. Examples will include pressure sensors, accelerometers, gyros, FR filters, digital mirrors, microfluidics, micro total-analysis system, biomedical implants, etc.




EE 187 - VLSI and ULSI Technology

9 units (3-0-6); third term. Prerequisites: APh/EE 9 ab, EE/APh 180 or instructor’s permission. This course is designed to cover the state-of-the-art micro/nanotechnologies for the fabrication of ULSI including BJT, CMOS, and BiCMOS. Technologies include lithography, diffusion, ion implantation, oxidation, plasma deposition and etching, etc. Topics also include the use of chemistry, thermal dynamics, mechanics, and physics.


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